Pirani Capacitance Diaphragm Gauge - PCG400

Pirani Capacitance Diaphragm Gauge PCG400 AND PCG410

The INFICON PCG Pirani Capacitance Diaphragm Gauge is the first vacuum gauge to combine the advantages of a ceramic capacitance diaphragm gauge and the cost effectiveness of a Pirani in one compact gauge.

In the measurement range between 100 mbar (75 Torr) and atmosphere, where heat transfer devices (such as Pirani and convection-enhanced Pirani) lose sensitivity and have a non-linear gas-type-dependent behavior, the INFICON capacitance diaphragm technology supplies accurate, gas-type-independent measurements.Available with up two integrated relays, the PCG can eliminate the need for 1/2 atm or other expensive switches.To simplify tool integration, the Pirani and CDG signal are combined into a single log/linear analog output spanning the fullrange of the gauge.

The INFICON PCG combines patented dual Pirani sensor and gas-typeindependent ceramic capacitance diaphragm technologies in an affordable, space saving gauge.

HIGHER ACCURACY

The INFICON PCG has a specified accuracy of ±2.5% of reading at atmosphere for accurate, repeatable pressure measurements not available with standard Pirani technology.

The INFICON PCG400 and PCG410 combine Pirani and capacitance diaphragm technologies for accurate and repeatable pressure measurement from 5 x 10-4 to 1500 mbar (3.8 x 10-4 to 1125 Torr).Unlike convection-enhanced Pirani gauges,the PCG can be mounted in any orientation for added flexibility in tool design.

Combonation Gague Features At A Glance

Mounts in any orientation

Fast response time on venting reduces cycle time

Fast, reliable readings without atmospheric

adjustment

Single log/linear analog output signal for easy

tool integration

Compact design saves valuable tool space

Applications:

Loadlock

Forevacuum pressure monitoring

Safety circuits in vacuum systems

General measurement and control in the

medium and rough vacuum range

Control of high vacuum ionization gauges

Specifications:

Measurement range 5 x 10-4 to 1500 mbar, (3.8 x 10-4 to 1125 Torr)

Repeatability 1 x 10-3 to 1100 mbar ±2 % of reading

Mounting orientationany

Admissible pressure, max. absolute5 bar

Temperature Operation (ambient) +5 to +60 °C

Storage -20 to +65 °C

Bakeout at flange +80 °C

Power supplyVoltage 15 to 30 VDC

Consumption, max. 2.5 W

Cable length, max.100 m

Materials exposed to process gases AI2O3, tungsten, stainless steel, Cu, glass, NiFe, Ni, SnAg,

Internal volume KF / CF 6 cm3 / 8 cm3

Weight KF / CF 90 g / 120 g

Protection type IP 40